STARFIRE INDUSTRIES LLC
High-power impulse magnetron sputtering (HiPIMS) thin-film deposition system called Super Kick™ for manufacturing solar cells and electronic materials
- Sector
- Clean tech
- Headquarters
- CHAMPAIGN, IL
- Total capital
- $15.4M
- Federal grants
- $15.4M
- 25 awards · 2015–2023
- Rank in peer group#1 of 23
- Private capital raised
- None on recordNo Form D filings on SEC EDGAR. Some raises are not filed.
- Federal contracts
- None on recordNo federal contract awards found.
- Granted patents
- 14
- 26 pending · first 2015
- Rank in peer group#3 of 23
Capital timeline
Latest events
- Federal grantDefense · Phase II · Low-cost, Mev-scale Dc Linear Accelerators For E-beam & X-ray$1.5M
- Federal grantEnergy · Phase I · Bipolar plate manufacturing and reconditioning using next-generation IMPULSE® HiPIMS etching, surface preparation, and pinhole-free deposition of corrosion-resistant, low-ICR coatings$200K
- Federal grantEnergy · Phase I · Coatings for SiC LWR fuel claddings using quasi-conformal PVD and e-CVD IMPULSE® HiPIMS coatings direct onto the CMC$200K
- Federal grantEnergy · Phase I · Large-Area Superconducting Tape Processing Using Novel Inverted Cylindrical Magnetron PVD/Etch/e-CVD Technique$200K
- Federal grantEnergy · Phase I · Next-generation HiPIMS for e-CVD, PVD, etch, and precision implantation control for PV Manufacturing$200K
- Federal grantEnergy · Phase II · Scalable Manufacturing Using IMPULSE® + Positive Kick For Corrosion-Resistant, High-Temperature Multilayer Films For Accident Tolerant Nuclear Fuel$1.1M
- Federal grantDefense · Phase II · Erosion-Resistant Leading-Edge Conformal Coatings For Large-Diameter IBR And Lift-Fan Blade Manufacturing Using IMPULSE + Positive Kick Next-Generation HiPIMS PVD$750K
Show 18 earlier federal awards
- Federal grantEnergy · Phase II · Portable API Neutron Generator$1.1M
- Federal grantEnergy · Phase II · Precision Ion Energy & Flux Control For In-Situ Magnetron Deposition & Etching For Plasma-Assisted Material Synthesis At The Atomic Scale$1.1M
- Federal grantEnergy · Phase II · High-Quality Conductive Bellows Coatings Using Conformal Ionized PVD To Replace Unreliable Electroplating Processes$1.1M
- Federal grantEnergy · Phase II · Scalable Manufacturing Using IMPULSE® + Positive Kick For Corrosion-Resistant, High- Temperature Multilayer Films For Accident Tolerant Nuclear Fuel$1.1M
- Federal grantNASA · Phase I · (U,Zr)C Mixed Carbide Fuel Coatings Using Impulse PVD$125K
- Federal grantEnergy · Phase I · Portable Detector For Fast Neutron And X-Ray Digital Radiography Using Transverse Anderson Localization Scintillating Nanoguides$207K
- Federal grantEnergy · Phase I · Precision Ion Energy & Flux Control For In-Situ Magnetron Deposition & Etching For Plasma-Assisted Material Synthesis At The Atomic Scale$205K
- Federal grantEnergy · Phase I · Super Kick: Efficient Combination Of HiPIMS & RF Discharges For Large Volume Plasma Potential And Electron Temperature Control$205K
- Federal grantEnergy · Phase I · High-Quality Conductive Bellows Coatings Using Conformal Ionized PVD To Replace Unreliable Electroplating Processes$200K
- Federal grantEnergy · Phase II · Portable API Neutron Generator$1.1M
- Federal grantEnergy · Phase I · Ceramic ATF Cladding Using Reactive HiPIMS Sputtering With Positive Kick For Thick, Corrosion Resistant, High-Temperature Multilayer Films$200K
- Federal grantEnergy · Phase II · Am-Be Replacement with Tunable Neutron Spectra$1.0M
- Federal grantEnergy · Phase I · Portable API Neutron Generator$150K
- Federal grantEnergy · Phase II · AmBe Replacement with Tunable Neutron Spectra$1M
- Federal grantEnergy · Phase II · TEMHDDriven Liquid Lithium for Neutron Generator Targets$1M
- Federal grantEnergy · Phase II · Plasma Facing Component Laser-Based Surface Microtexturing For Liquid Metal Wetting, Improved Heat Transfer, Safety and Control$1.0M
- Federal grantEnergy · Phase I · AmBe Replacement With Tunable Neutron Spectra$150K
- Federal grantEnergy · Phase I · TEMHD-Driven Liquid Lithium for Neutron Generator Targets$149K
Node area is scaled to amount. Form D reports securities sold, which can differ from an announced round; filings are numbered in the order they were made.
Standing among 23 peers
Line = medianClean tech · System
- Federal grants#1 · top 4%
- Granted patents#3 · top 13%
Cumulative measures favor older companies. Rankings describe position today, not outcome. Below the median, ranks show as a band rather than a number.
Founders and team
No founders are linked to this company yet.
Founders appear once a person is matched to the company through its own patents, grants or filings. We never infer people from social profiles.
Checked: USPTO inventors; federal award principal investigators; SEC Form D related persons · Oct 23, 2026
Claim this profile to add your teamWhat it has protected
USPTO · 14 granted of 40- PendingModulated Pulsed Microwave Waveform In A Power Source For Achieving A Desired Electron Energy Distribution In A PlasmaUSPTOApplication 19325102
- PendingLow-temperature Microwave-powered Plasma Reduction System And MethodologyUSPTOApplication 19325065
- PendingNon-thermal Plasma Direct Reduction Of Ore UltrafinesUSPTOApplication 19325032
Show all 40 patent records
- Modulated Pulsed Microwave Waveform In A Power Source For Achieving A Desired Electron Energy Distribution In A PlasmaAug 27, 2026 · Application 19325102Pending
- Low-temperature Microwave-powered Plasma Reduction System And MethodologyJun 18, 2026 · Application 19325065Pending
- Non-thermal Plasma Direct Reduction Of Ore UltrafinesMar 12, 2026 · Application 19325032Pending
- Pulsed Power Module With Pulse And Ion Flux Control For Magnetron SputteringFeb 5, 2026 · Application 19033241Pending
- Method And Apparatus For Metal And Ceramic Nanolayering For Accident Tolerant Nuclear Fuel, Particle Accelerators, And Aerospace Leading EdgesJan 1, 2026 · Application 19033192Pending
- Pulsed Power Module With Pulse And Ion Flux Control For Magnetron SputteringJan 28, 2025 · US 12,211,680Granted
- Method And Apparatus For Metal And Ceramic Nanolayering For Accident Tolerant Nuclear Fuel, Particle Accelerators, And Aerospace Leading EdgesJan 28, 2025 · US 12,211,679Granted
- System For Coupling RF Power Into Linacs And Bellows Coating By Magnetron Sputtering With Kick PulseJun 11, 2024 · US 12,009,192Granted
- Food Irradiation Dose UniformityMar 7, 2024 · Application 18242499Pending
- Impulse Power Supply For Compact System For Coupling Radio Frequency Power Directly Into Radio Frequency LinacsNov 9, 2023 · Application 18143597Pending
- Associated Particle Detection For Performing Neutron Flux Calibration And ImagingJun 13, 2023 · US 11,675,102Granted
- Atmospheric Cold Plasma Jet Coating And Surface TreatmentJan 24, 2023 · US 11,560,627Granted
- Bellows Coating By Magnetron Sputtering With Kick PulseJul 21, 2022 · Application 17580585Pending
- Pulsed Power Module With Pulse And Ion Flux Control For Magnetron SputteringJul 20, 2021 · US 11,069,515Granted
- Compact System For Coupling RF Power Directly Into RF LinacsMay 18, 2021 · US 11,008,650Granted
- Azimuthal Associated Particle Imaging Neutron Generator For Neutron X-ray Inspection System Gamma Imaging For Oil And Gas TechnologiesMar 23, 2021 · US 10,955,582Granted
- Compact System For Coupling RF Power Directly Into RF LinacsApr 14, 2020 · US 10,624,199Granted
- Scalable Multi-role Surface-wave Plasma GeneratorJan 7, 2020 · US 10,531,553Granted
- Long-life High-efficiency Neutron GeneratorJul 30, 2019 · US 10,366,795Granted
- Scalable Multi-Role Surface-Wave Plasma GeneratorJan 9, 2018 · US 9,867,269Granted
- Compact High-voltage Plasma Source For Neutron GenerationAug 8, 2017 · US 9,728,376Granted
- Neutron Radiation SensorDec 15, 2015 · US 9,213,112Granted
- Modulated Pulsed Microwave Waveform In A Power Source For Achieving A Desired Electron Energy Distribution In A PlasmaApplication PCTUS2025045812Pending
- Microdischarge Light Source Configuration And Illumination SystemApplication PCTUS2006024104Pending
- Non-thermal Plasma Direct Reduction Of Ore UltrafinesApplication PCTUS2025045799Pending
- Food Irradiation Dose UniformityApplication PCTUS2023032018Pending
- Impulse Power Supply For Compact System For Coupling Radio Frequency Power Directly Into Radio Frequency LinacsApplication PCTUS2023021087Pending
- Food Irradiation Dose UniformityApplication 63403405Pending
- Impulse Power Supply For Compact System For Coupling Radio Frequency Power Directly Into Radio Frequency LinacsApplication 63338090Pending
- Bellows Coating By Magnetron Sputtering With Kick PulseApplication PCTUS2022013198Pending
- Bellows Coating By Magnetron Sputtering With Kick PulseApplication 63139609Pending
- Method And Appartus For Metal And Ceramic Nanolayering For Accident Tolerant Nuclear Fuel, Particle Accelerators, And Aerospace Leading EdgesApplication PCTUS2020019743Pending
- Azimuthal Associated Particle Imaging Neutron Generator For Neutron X-ray Inspection System Gamma Imaging For Oil And Gas TechnologiesApplication PCTUS2019019636Pending
- Method And Appartus For Metal And Ceramic Nanolayering For Accident Tolerant Nuclear FuelApplication 62810230Pending
- Pulsed Power Module With Pulse And Ion Flux Control For Magnetron SputteringApplication PCTUS2018037117Pending
- Atmospheric Cold Plasma Jet Coating And Surface TreatmentApplication PCTUS2018034166Pending
- Azimuthal API Neutron Generator For nXis Gamma Imaging for Oil and Gas TechnologiesApplication 62635308Pending
- A Compact System For Coupling RF Power Directly Into RF LinacsApplication PCTUS2017059968Pending
- Pulsed Power Module With Pulse And Ion Flux Control For Magnetron SputteringApplication 62518362Pending
- Compact System For Coupling RF Power Directly Into RF LinacsApplication 62416900Pending
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- GLANRIS WATER SYSTEMS INCSimilar federal contract value in Clean tech · null in contracts
- OLIN PARTNERSHIP LTDSimilar federal contract value in Clean tech · null in contracts
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Regulatory activity · Clean tech
- Air Plan Approval; Michigan; Redesignation and Maintenance Plan for the Partial St. Clair 2010 1-Hour Sulfur Dioxide (SO2) NAAQS Nonattainment AreaEnvironmental Protection Agency
- Air Plan Approval; Delaware; 2006 24-Hour Fine Particulate Matter Limited Maintenance Plan for the Philadelphia Nonattainment AreaEnvironmental Protection Agency
- Air Plan Approval; Oklahoma; Updates to the State Implementation Plan for New Source Review Permitting and General SIP ProvisionsEnvironmental Protection Agency
- Epyrifenacil; Pesticide TolerancesEnvironmental Protection Agency
- Fluoxapiprolin; Pesticide TolerancesEnvironmental Protection Agency
- Chlormequat Chloride; Pesticide TolerancesEnvironmental Protection Agency
Rules are matched to sector, not to company. Recent activity in a sector is context rather than a signal about this business — until rules are matched to what a company actually builds, the section is shown as context and nothing more.
Sources
Federal grants from SBIR/STTR, NIH, NSF and DoD records. Federal contracts from USAspending.gov. Private capital from SEC Form D. Patents from USPTO. Publications from OpenAlex. Regulatory activity from the Federal Register. Press matched on company name.
How to read this page
Figures show associations in public records, not causes or predictions. Nothing here is investment advice. An em-dash means no record was found under this company's name, not that none exists.
Data freshness
SEC Form D filings through . SBIR and STTR awards through .