Boston Micromachines Corporation

Aerospace · Private

Segmented, micromachined deformable mirrors with tip-tilt-piston compensation and driving electronics for wavefront control

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Updated Oct 23, 2026 · bostonmicromachines.com

Sector: Aerospace
Total capital: $15.4M

Federal grants: $1.7M; 3 awards · 2016–2024; Rank in peer group#26 of 91
Private capital raised: None on recordNo Form D filings on SEC EDGAR. Some raises are not filed.
Federal contracts: $13.7M; 53 awards · NASA, Defense, Health and Human S; Rank in Aerospace#193 of 1335
Granted patents: None on recordNo USPTO grants. Applications publish after 18 months.

Capital timeline

Latest events

Jun 2025Federal contractDefense · Bmc Deformable Mirrors$43K
Oct 2024Federal contractDefense · Custom Deformable Mirror$67K
Jun 2024Federal contractDefense · High Energy Laser$275K
Jun 2024Federal grantNASA · Phase II · SBIR Phase II - Surface Finish Improvement In Mems Deformable Mirrors For High Contrast Imaging$847K
Jun 2024Federal contractNASA · SBIR Phase II - Surface Finish Improvement In Mems Deformable Mirrors For High Contrast Imaging$847K
Apr 2024Federal contractDefense · F253700$252K
Aug 2023Federal contractNASA · Boston Micromachines Multi HEX-111 Deformable Mirror$29K

Show 49 earlier federal awards

Aug 2023Federal contractNASA · FY23 SBIR Phase I Surface Finish Improvement In Mems Deformable Mirrors For High Contrast Imaging$149K
Mar 2023Federal contractDefense · P/n: Sw Custom$8K
Jul 2020Federal contractDefense · Research And Development$749K
Jun 2020Federal contractNASA · Eliminating High-spatial-frequency Topography Due To Print-through In Mems Deformable Mirrors$710K
Jan 2020Federal contractHealth and Human S · Purchase Of Custom Electronics With Avalanche Photodiode (apd) Modules To Replicate Existing Detection Channel,$25K
Sep 2019Federal contractCommerce · This Order Is For Deformable Mirrors In Support Of Nist's Mission To Develop Quantum Information Science.$29K
Aug 2019Federal contractNASA · Eliminating High-spatial-frequency Topography Due To Print-through In Mems Deformable Mirrors$124K
Aug 2019Federal contractNASA · Primary Tweeters: Segmented Micro-mirrors For Picometer-scale Wavefront Compensation In Space-based Observatories$736K
Jul 2018Federal grantNASA · Phase I · Primary Tweeters: Segmented Micro-Mirrors for Picometer-Scale Wavefront Compensation in Space-Based Observatories$123K
May 2018Federal contractNASA · Boston Micromachines Corporation Proposes High-precision Deformable Mirror (dm) Systems With One Hundred Actuators Across The Active Aperture, Corresponding To Almost Eight Thousand Actuators In The Device S Circular Aperture, Using An Innovative New Approach For Packaging And Integration. The Proposed Work Focuses On A Technology Gap That NASA Has Identified As Critical For Space-based Exoplanet Imaging: Production Techniques For Small-stroke, High-reliability, High-precision Deformable Mirror $749K
Dec 2017Federal contractNASA · This Requirement For A Deformable Mirror And Control Electronics Testbed$234K
Aug 2017Federal contractDefense · Igf::ot::igf SBIR Phase II Research And Development$376K
Jun 2017Federal contractNASA · Igf::ot::igf We Propose To Develop A Design And Manufacturing Approach For A Small-stroke, High-precision Deformable Mirror Scalable To 10,000 Actuators, That Promises Inherent Advantages In Scalability, Yield, And Reliability In Comparison To Current Generation Microelectromechanical Systems (mems) Dms, To Address A Technology Gap For Next-generation Planet Finding Instruments. Our Proposed Design Aims To Ensure High Yield While Maintaining A Superb Optical Quality And Retain The Proven Aspects$124K
Apr 2017Federal contractDefense · Mini-dm Mems Deformable Mirror$13K
Apr 2016Federal grantNASA · Phase II · Improved Yield, Performance and Reliability of High-Actuator-Count Deformable Mirrors$749K
Apr 2016Federal contractNASA · Igf::ot::igf The Search For Life On Earth-like Extrasolar Planets Has Emerged As A Compelling Long-term Scientific Goal For NASA. That Goal Has Inspired Innovative Spacebased Coronagraphs That Aim To Collect Spectral Data From Earth-like Planets Orbiting Stars In Distant Solar Systems. Nasa's SBIR Solicitation Topic Proximity Glare Suppression For Astronomical Coronography Calls Specifically For Small Stroke, High Precision, Deformable Mirrors And Associated Driving Electronics Scalable To 10,0$1.2M
Sep 2015Federal contractDefense · Igf::ot::igf, All Efforts Required Under Tasks 1 And 2$150K
Jun 2015Federal contractNASA · Igf::ot::igf The Project Team Will Conduct Processing And Design Research Aimed At Improving Yield, Performance, And Reliability Of High-actuator-count Micro-electro-mechanical Deformable Mirrors (mems Dms) That Are Essential For Space-based Coronograph Instruments. The Primary Objectives Of This Phase I Proposal Are To Develop And Demonstrate Solutions To The Two Main Problems That Bmc Has Encountered In Scaling Up Its Dm Design And Manufacturing Processes To Array Sizes Of 4000 Actuators Or Mo$125K
Jan 2015Federal contractNASA · Kilo-dm Deformable Mirror$75K
Apr 2014Federal contractNASA · 3 Month Lease For A Modulating Retroreflector (mrr) With The Option To Purchase The Item At The End Of The 3 Months$198
Sep 2013Federal contractDefense · Deformable Mirror$86K
Apr 2013Federal contractNASA · Igf::ot::igf These Dms Are Designed To Fill A Critical Technology Gap In NASA S Plan For High-contrast Space-based Exoplanet Observatories. We Will Manufacture A Prototype Dm With A Continuous Mirror Facesheet, Having An Active Aperture Of 50MM Diameter, Supported By 2040 Electrostatic Actuators (50 Across The Diameter Of The Active Aperture), Spaced At A Pitch Of 1MM. The Dm Will Be Manufactured Using Silicon Microfabrication Tools. The Strategic Motivation For The Proposed Project Is To Advan$124K
Mar 2013Federal contractNASA · Multi-dm Mems Deformable Mirror And Drive Electronics (1 Ea). Shipping And Handling.$9K
Dec 2012Federal contractNASA · Igf::ot::igf - We Propose To Develop A 3064 Actuator, Continuous Facesheet Mems Deformable Mirror Using A Modified Fabrication Process That Will Eliminate Mid-spatial Frequency Surface Figure Errors Resulting From Actuator "print-through" Topography And Stress-induced Mirror Scallop Topography. These Figure Errors, Which Occur At Spatial Frequencies Outside The Dm Control Band, Are The Most Significant Technological Development Hurdle Preventing The Use Of Mems Dms In Proximity Glare Suppression$699K
Dec 2012Federal contractDefense · Multi-dm Mems Deformable Mirrors.$35K
Sep 2012Federal contractNASA · Igf::ot::igf Other Functions: This Is The Basic NASA Research Announcement Award For Boston Micromachines. The Proposed Research Will Advance The Technology Readiness Of The Mems Dms Components That Are Currently At The Forefront Of The Field, And The Project Will Be Led By The Manufacturer Of Those Components, Boston Micromachines Corporation (bmc). The Project Aims To Demonstrate Basic Functionality And Performance Of This Component In Critical Test Environments While Establishing Model-based$779K
Sep 2012Federal contractNASA · Igf::ot::igf Other Functions Contractor Shall Custom Mirror Calibration For Kilo-dm, Includes: 1) Generation Of Sinusoidal Shapes Over The Useful Stroke Of The Dm (10 Nm Resoultion Steps, 5 Spatial Frequency Cases) 2) Development Of Matlab Interface Software To Command The Dm 3) Techncical Support For Operation Of The Mirror System With The Above Mentioned Software (approx. 10 Hours) - (2) Two Kilo Cables$18K
Aug 2012Federal contractNASA · Kilo-dm Pcie Card Upgrade$3K
Apr 2012Federal contractNASA · Igf::ot::igf Other Function - The Goal Of This Project Is To Develop And Demonstrate A Reliable, Fault-tolerant Wavefront Control System That Will Fill A Critical Technology Gap In Nasa's Vision For Future Coronagraphic Observatories. The Project Outcomes Include Innovative Advances In Component Design And Fabrication And Substantial Progress In Development Of High-resolution Deformable Mirrors (dm) Suitable For Space-based Operation. Space-based Telescopes Have Become Indispensible In Advancing$748K
Feb 2012Federal contractNASA · This Project Will Develop And Demonstrate An Innovative Microfabrication Process To Substantially Improve The Surface Quality Achievable In High-resolution Continuous Membrane Mems Deformable Mirrors (dms). Project Specific Aims Include 2X Improvement In Small-scale Surface Flatness In Comparison To The Current State-of-the-art, And Substantial Reductions In Sub-aperture Scale Diffractive Losses Due To Actuator Print-through, Mirror Scallop, And Etch Access Hole Scatter In Continuous Membrane Me$124K
Sep 2011Federal contractDefense · Multi-dm Deformable Mirror$18K
Jun 2011Federal contractNASA · This Proposal Describes A New Concept To Drive Mems Dms Using Low-power, High-voltage Multiplexing. Compared To Other Reported Approaches, The Proposed Architecture Will Reduce Power Consumption By A Factor Of One Hundred, To A Level Of A Few Hundred Milliwatts. This Estimate Is Supported By Direct Measurements Obtained From Prototype Modules That Were Demonstrated In Phase I Research. In The Phase II Project We Will Scale Up This Innovative Circuit Dms That Boston Micromachines Corporation (bmc$600K
Jun 2011Federal contractNASA · We Propose To Design And Fabricate A Mems Micromirror Array Consisting Of 1021 Ultra-flat, Close-packed Hexagonal Mirror Elements, Each Capable Of 6MRAD Of Tip And Tilt, And 1.7UM Of Piston (ttp) Motion With Sub-nanometer Precision As Required For A Space-based Telescope Using A Hyper-contrast Coronagraph For Terrestrial Planet Finding. Fabrication Process Enhancements Developed In The Phase I Effort To Increase Device Yield By Significantly Reducing The Defect Density In Polysilicon Films And R$600K
Feb 2011Federal contractNASA · The Goal Of This Project Is To Develop And Demonstrate A Reliable, Fault-tolerant Wavefront Control System That Will Fill A Critical Technology Gap In Nasa's Vision For Future Coronagraphic Observatories. The Project Outcomes Include Innovative Advances In Component Design And Fabrication And Substantial Progress In Development Of High-resolution Deformable Mirrors (dm) Suitable For Space-based Operation. Space-based Telescopes Have Become Indispensible In Advancing The Frontiers Of Astrophysics$100K
Sep 2010Federal contractNASA · Dithering System For Deformable Mirrors$56K
Jun 2010Federal contractDefense · Micro Electromechanical Mirror System$32K
Jan 2010Federal contractNASA · Boston Micromachines Corporation (bmc), A Leading Developer Of Unique, High-resolution Micromachined Deformable Mirrors (dms), Will Develop A Compact, Low-power, High-voltage Multiplexed Driver Suitable For Integration With Those Dms In Space-based Wavefront Control Applications. The Proposed Driver Architecture Will Drastically Reduce Power Consumption And Size. Based On Parameters Measured Using An Existing 993-ACTUATOR Dm That Bmc Developed For NASA In Support Of The Terrestrial Planet Findin$100K
Jan 2010Federal contractNASA · It Is Proposed To Advance Manufacturing Science And Technology To Improve Yield And Optical Surface Figure In High Actuator Count, High-resolution Deformable Mirrors (dm) Required For Wavefront Control In Space-based High Contrast Imaging Instruments. As The Scale Of Batch Fabricated, Polysilicon Surface Micromachined Mems Dms Increases To Thousands Of Actuators The Associated Increase In Devices Size Limits The Achievable Yield Due To Micro-scale Defects Introduced During The Manufacturing Proc$100K
Dec 2009Federal contractHealth and Human S · Laboratory Equipment And Supplies$9K
Sep 2008Federal contractDefense · Multi-dm Mems Deformable Mirror$17K
Sep 2008Federal contractNASA · This Is For A Mems Mirror And A Driver$130K
Aug 2008Federal contractHealth and Human S · Laboratory Equipment And Supplies$39K
May 2008Federal contractDefense · Multi-dm Mems Deformable Mirror$30K
May 2008Federal contractNASA · Deformable Mirror Wavefront Control System Delivery DATE:08/13/2008 Shipping Charges Included$17K
Jan 2008Federal contractNASA · This Requirement Is For A Mems Mirror And A Driver.$150K
Oct 2007Federal contractDefense · Scientific Research Services$743K
Sep 2007Federal contractDefense · Mini-dm 32 Element Deformabmirror System$10K
Dec 2006Federal contractNASA · Ultra Tip-tilt-piston Mems Deformable Mirror$600K
Feb 2006Federal contractNASA · Multiple Pr#'s For This Action: 4200136654, 4200141842 High Resolution Silicon Deformable Mirrors$600K

Federal awards are summed by year (56 awards); hover a bar for the split. Form D reports securities sold, which can differ from an announced round; filings are numbered in the order they were made.

Standing among 91 peers

Line = median

Aerospace · Device

Federal grants#26 · top 29%

Cumulative measures favor older companies. Rankings describe position today, not outcome. Below the median, ranks show as a band rather than a number.

Founders and team

No founders are linked to this company yet.

Founders appear once a person is matched to the company through its own patents, grants or filings. We never infer people from social profiles.

Checked: USPTO inventors; federal award principal investigators; SEC Form D related persons · Oct 23, 2026

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What it has protected

No granted patents are on record.

USPTO usually publishes applications 18 months after filing, so recent applications may not be visible yet. Patents assigned under a different entity name won’t match.

Checked: USPTO granted patents and published applications · Oct 23, 2026

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Regulatory activity · Aerospace

Sector-level, not company-level

06 Jul 2026Nondiscrimination in Federally Assisted Programs of NASA-Effectuation of Title VI of the Civil Rights Act of 1964National Aeronautics and Space Administration
01 Jul 2026Special Conditions: AMAC Aerospace, The Boeing Company Model 747- 8 Airplane; Side-Facing SeatsFederal Aviation Administration
26 Jun 2026Standard Instrument Approach Procedures, and Takeoff Minimums and Obstacle Departure Procedures; Miscellaneous AmendmentsFederal Aviation Administration
23 Jun 2026Operating Limitations at John F. Kennedy International AirportFederal Aviation Administration
23 Jun 2026Operating Limitations at New York LaGuardia AirportFederal Aviation Administration
18 Jun 2026Special Conditions: Honeywell Aerospace US LLC, Dassault Aviation Model Falcon 900EX Airplane; Electronic System Security Protection From Unauthorized External AccessFederal Aviation Administration

Rules are matched to sector, not to company. Recent activity in a sector is context rather than a signal about this business — until rules are matched to what a company actually builds, the section is shown as context and nothing more.

Sources

Federal grants from SBIR/STTR, NIH, NSF and DoD records. Federal contracts from USAspending.gov. Private capital from SEC Form D. Patents from USPTO. Publications from OpenAlex. Regulatory activity from the Federal Register. Press matched on company name.

How to read this page

Figures show associations in public records, not causes or predictions. Nothing here is investment advice. An em-dash means no record was found under this company's name, not that none exists.

Data freshness

SEC Form D filings through Oct 23, 2026. SBIR and STTR awards through Oct 21, 2026.